Realization of Thin Film Specimens for Micro Tensile Tests

This paper is focused on specimen's design and fabrication for micro tensile tests. The experimental approach is based on a new micro tensile testing system and the development of silicon frames sustaining submicron thick self-standing films. The beam design has been optimized using Finite Element Simulations. SiN and Al beams with very large length on thickness ratio have been released from silicon substrate using standard etching process. The experimental force-displacement curve that has been obtained on a 3 mm x 400 mum times 1 mum aluminum beam is shown and discussed.