Wavelength Dependence of Excimer Laser Irradiation Effects on Ethylene-Tetrafluoroethylene Copolymer

Irradiation with an ArF laser at wavelength of 193 nm formed diene in a whole ethylene-tetrafluoroethylene copolymer (ETFE) film and irradiation with a KrF and a XeCl laser at 248 and 308 nm induced the carbonization of ETFE. ArF-laser radiation at 193 nm formed diene in the bulk of ETFE via the process of single-photon absorption, and in case of KrF and XeCl-laser irradiation multiphoton absorption brought about the carbonization of ETFE. The surface analysis by X-ray photoelectron spectroscopy showed that excimer laser-induced elimination of fluorine atoms depended on the laser wavelength.