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Formation of donor centers during annealing of erbium-implanted silicon
Formation of donor centers during annealing of erbium-implanted silicon
1996
O.V. Aleksandrov
N. A. Sobolev
Elena I. Shek
A. V. Merkulov
Keywords:
Annealing (metallurgy)
Erbium
Materials science
Silicon
Optoelectronics
Correction
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