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A configurable single axis Si-MEMS Gyro
A configurable single axis Si-MEMS Gyro
2021
S. König
S. Meier-Meybrunn
M. Ruf
A. Jackle
J. Pfeiffer
P. Zeller
M. Zinkstein
S. Stahl
U. Loffelmann
M. Mögel
D. Grolle
Stefan Rombach
Keywords:
Optoelectronics
single axis
Vibrating structure gyroscope
Physics
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