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Investigation of thermal stability of Si0.7Ge0.3Si stacked multilayer with As ion-implantation
Investigation of thermal stability of Si0.7Ge0.3Si stacked multilayer with As ion-implantation
2021
Yanrong Wang
Yongliang Li
Cheng XiaoHong
Hanxiang Wang
Qide Yao
Jing. Zhang
Wenkai Liu
Guilei Wang
Jiang Yan
Wenwu Wang
Keywords:
Composite material
Ion implantation
Materials science
Thermal stability
Correction
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