Fabrication of high-quality microflexures using micromilling techniques
2010
This research focuses on the feasibility of using
micromilling as a process for fabricating the flexural body of
mesoscale nanopositioners. A desire to fabricate non-silicon
microflexures for more favorable material properties and flexural
responses has led MIT's Precision Compliant Systems lab to
investigate the use of various metals in the design of mesoscale
six-axis HexFlex nanopositioners. Micromilling is being sought as
an alternative method of manufacturing HexFlex flexural bodies due
to its inherent process and material flexibility. Cutting forces
were approximated (and verified using FEM and previously-measured
results) in order to select cutting parameters that would avoid
tool failure and ensure workpiece integrity. Several HexFlex
devices were successfully micromilled from various aluminum alloys.
Total machining time, including setup and tool changes, was around
1.5 hours per part. The integrity of each part was verified using
optical microscopy and white-light interferometry to inspect for
any microcracks or otherwise unfavorable by-products of the milling
process. Ultimately, it was shown that micromilling is a feasible
process for manufacturing low-volume to-spec mesoscale
nanopositioners (±3 [mu]m) with surface roughnesses of less than
0.300 [mu]m. Process improvements are suggested based on
observations before and during the machining
process.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
8
References
0
Citations
NaN
KQI