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Gate-Last Integration on planar FDSOI for low-VTp and low-EOT MOSFETs
Gate-Last Integration on planar FDSOI for low-VTp and low-EOT MOSFETs
2013
S. Morvan
F. Andrieu
Cédric Leroux
X. Garros
M. Casse
F. Martin
R. Gassilloud
Y. Morand
P. Besson
Catherine Euvrard
Maurice Rivoire
A. Seignard
L. Desvoivres
S. Barnola
Nacima Allouti
U. Weber
Peter Baumann
O. Weber
L. Tosti
P. Perreau
F. Ponthenier
G. Ghibaudo
T. Poiroux
Keywords:
Electronic engineering
Planar
Materials science
Optoelectronics
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