Surface Acoustic Wave Resonators Using Lithium Niobate on Silicon Carbide Platform

This work demonstrates a group of shear horizontal (SHO) mode surface acoustic wave (SAW) resonators using Lithium Niobate (LiNbO3) thin films on Silicon Carbide (SiC) substrates. The fabricated resonator has demonstrated a large effective electro-mechanical coupling ( $kt^{2}$ ) of 26.6% and a high-quality factor (Bode-Q) of 1092, hence resulting in a high figure of merit (FoM= $kt^{2}$ ·Bode-Q) of 290 at 1.90 GHz. Additionally, these fabricated resonators show scalable resonances from 1.71 GHz to 3.17 GHz, and impedance ratios between 55.9 dB and 67.5 dB.