Multiwavelength Holography: Height Measurements Despite Axial Motion of Several Wavelengths During Exposure

Interferometric measurements of rotating objects face an axial motion component if the optical axis of the measurement system is not pointing towards the axis of rotation. In a typical interferometer, axial motion of half a wavelength reduces the interference contrast to zero. Our setup compensates for this axial component by an adapted variation of the reference path length during exposure utilizing a piezoelectric actuator. We present off-center measurements on a cylinder, rotating with different angular velocities. The repeatability of these measurements is dominated by motion blur, which demonstrates that the compensation of the axial motion works accurately.