Old Web
English
Sign In
Acemap
>
Paper
>
Shape control of SiC trench structure by Si-vapor ambient annealing
Shape control of SiC trench structure by Si-vapor ambient annealing
2016
Norihito Yabuki
Satoshi Torimi
Satoru Nogami
Tadaaki Kaneko
Makoto Kitabatake
Keywords:
Annealing (metallurgy)
Trench
Composite material
Materials science
shape control
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]