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A MEMS-based Capacitive Flexible Film Force Sensor with Polymer Insulating Flat Dielectric
A MEMS-based Capacitive Flexible Film Force Sensor with Polymer Insulating Flat Dielectric
2017
Gao-Feng Zhou
Lujun Cui
Zexiang Zhao
Zheng-Feng Li
Shi-Rui Guo
Huichao Shang
Keywords:
Polymer
Capacitive sensing
Dielectric
Microelectromechanical systems
Electronic engineering
Materials science
Optoelectronics
force sensor
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