VCO with a Film Bulk Acoustic Resonator

A high Q resonator and its tuning in a wide frequency range have been realized by using the BAW resonator VCO technology.The selection of MBVD model parameters of BAW resonator has been done.The selection and layout of the circuit have been arranged and the design and fabrication of the device have been optimized.The influence due to the bonding wire between the FBAR and IC has been eliminated and the frequency adjustment has been avoided.A VCO oscillator with the central frequency of 2.1 GHz has been developed,its output power is up to 5~10 dBm,the tuning range up to 2.044‰,the sideband phase noise up to-143 dBc/1 Hz@1 MHz.