Old Web
English
Sign In
Acemap
>
Paper
>
Kerf-less layer transfer of monocrystalline silicon used by hydrogen implantation
Kerf-less layer transfer of monocrystalline silicon used by hydrogen implantation
2016
Changbum Lee
Jaewoo Lee
Jiwoong Kim
Bo-Yun Jang
Wooyoung Yoon
Keywords:
Monocrystalline silicon
Hydrogen
Wafering
Ceramic materials
Metallurgy
Materials science
Inorganic chemistry
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
2
Citations
NaN
KQI
[]