Low-Temperature Growth of Ferroelectric Hf0.5Zr0.5O2 Thin Films Assisted by Deep Ultraviolet Light Irradiation

Hyunjin Joh,Gopinathan Anoop,Won-June Lee,Dipjyoti Das,Jun Young Lee,Tae Yeon Kim,Hoon Kim,WooJun Seol,Jiwon Yeom,Sanghun Jeon,Seungbum Hong,Myung-Han Yoon,Ji Young Jo

Low-Temperature Growth of Ferroelectric Hf0.5Zr0.5O2 Thin Films Assisted by Deep Ultraviolet Light Irradiation

2021

Hyunjin Joh
Gopinathan Anoop
Won-June Lee
Dipjyoti Das
Jun Young Lee
Tae Yeon Kim
Hoon Kim
WooJun Seol
Jiwon Yeom
Sanghun Jeon
Seungbum Hong
Myung-Han Yoon
Ji Young Jo

Low-temperature deposition of inorganic ferroelectric (FE) thin films is highly demanded for lowering the environmental impact through lesser energy consumption. Doped HfO2-based FE thin films comm...

Keywords:

Optoelectronics
Deposition (law)
Irradiation
Materials science
ultraviolet light
Doping
crystallization temperature
Thin film
Ferroelectricity

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