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Options for Hardening FinFETS with Flowable Oxide Between Fins
Options for Hardening FinFETS with Flowable Oxide Between Fins
2017
H.L. Hughes
Patrick J. McMarr
Ji-Ung Lee
Michael Alles
En Xia Zhang
D. R. Ball
Bruce B. Doris
Richard G. Southwick
Keywords:
Oxide
Fin
Radiation hardening
Composite material
Hardening (computing)
Materials science
Correction
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