Quantum‐Tunneling Metal‐Insulator‐Metal Diodes Made by Rapid Atmospheric Pressure Chemical Vapor Deposition

A quantum?tunneling metal?insulator?metal (MIM) diode is fabricated by atmospheric pressure chemical vapor deposition (AP?CVD) for the first time. This scalable method is used to produce MIM diodes with high?quality, pinhole?free Al2O3 films more rapidly than by conventional vacuum?based approaches. This work demonstrates that clean room fabrication is not a prerequisite for quantum?enabled devices. In fact, the MIM diodes fabricated by AP?CVD show a lower effective barrier height (2.20 eV) at the electrode–insulator interface than those fabricated by conventional plasma?enhanced atomic layer deposition (2.80 eV), resulting in a lower turn on voltage of 1.4 V, lower zero?bias resistance, and better asymmetry of 107.