Fabrication of Al2O3 nano-micro patterns by Al2O3 dispersion resin using UV imprint lithography

Abstract Aluminum oxide (Al 2 O 3 ) has excellent properties in terms of hardness, abrasion resistance, refractive index, electrical insulation and chemical stability; therefore, it has been used in various optical applications such as for resistance random access memory active layers and nano-micro polishing. In this study, a functional Al 2 O 3 nanoparticle resin with refractive index control was developed and various nano-micro structures were formed using UV-nanoimprint lithography. It is also possible to adjust and measure the desired optical properties by controlling the specifications of the formed Al 2 O 3 structures. It was confirmed that imprinting is possible not only on traditional rigid substrates but also on flexible ones. Furthermore, scanning electron microscopy showed that the various Al 2 O 3 nano-micro structures were well formed. The effect of annealing temperature on the phase change and crystallinity was investigated by X-ray diffraction. The hardness and Young's modulus were also measured by using a nanoindenter. The refractive index of Al 2 O 3 dispersion resin composition was examined using an ellipsometer. Moreover, the optical characteristics of each Al 2 O 3 nano-micro structure were measured by UV–visible spectroscopy.