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Xanes characterization in PECVD-SiOxNy films
Xanes characterization in PECVD-SiOxNy films
2004
Denise Criado
Marco Isaías Alayo Chávez
Inés Pereyra
Márcia Carvalho de Abreu Fantini
Keywords:
Plasma-enhanced chemical vapor deposition
Analytical chemistry
Materials science
XANES
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