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Relationship between polishing performance and viscoelasticity of epoxy resin polishing pads
Relationship between polishing performance and viscoelasticity of epoxy resin polishing pads
2014
Junji Murata
Motomu Inazawa
Yasuhiro Tani
Yu Zhang
Keywords:
Polishing
Viscoelasticity
Epoxy
Materials science
Composite material
Correction
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