Research on fast and high precision electric adjusting mirror

The mirror in the high-energy laser beam combining system needs to be adjusted quickly and accurately before working. A two-dimensional electronically controlled adjustment mirror is designed. The main body of system adopts an integrated flexible support design. The drive adopts a stepping motor and a deceleration mechanism to drive the screw. The precise measurement of the mirror deflection angle adopts an eddy current sensor and DSP is used as main Control module. The working principle and design of system is analyzed, which conducts in-depth research on the system calibration method and control algorithm. In order to meet the requirements of system adjustment speed, the S-shaped acceleration and deceleration algorithm is applied as the control algorithm of adjustment mirror. A piecewise linear system calibration method is adopted. The system has been tested experimentally, and experimental results show that within the range of ±500″, the in-position time is within 3s, and the control error is less than 2″, which can meet the system requirements.