All-interferometric six-degrees-of-freedom sensor based on laser self-mixing
2009
We report on the development of an all-interferometric sensor based on the laser-self-mixing for the simultaneous
detection of multi-degrees-of-freedom displacement of a remote target. The prototype system consists only of a laser
head, equipped with 6 diode lasers and a properly designed reflective target. Information on a single degree-of-freedom
motion is extracted by the differential measurement of two linear displacements by means of two nominally identical
self-mixing interferometers. The sensor has been experimentally tested to measure yaw, pitch, roll, straightness and
flatness corrections over a continuous linear range of 1 m, with resolutions of 0.7 μm (longitudinal), 20 μm (straightness
and flatness), 0.001° (yaw and pitch) and 0.015 °(roll).
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