Silicon Nitride Waveguide-Integrated Silicon Photodiodes for Blue Light
2021
We demonstrate silicon nitride waveguide-integrated silicon lateral p-i-n photodiodes at λ=488nm. A 50-µm long device exhibits a dark current of 178pA at -5V, a responsivity of 0.31 ±0.01A/W, and an external quantum efficiency of ~78%.
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