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Study on the behavior of the Plasma Plume and Film Quality using Pulsed Laser Deposition with Tungsten Target
Study on the behavior of the Plasma Plume and Film Quality using Pulsed Laser Deposition with Tungsten Target
2008
Hiroharu Kawasaki
Tamiko Ohshima
Y. Yagyuu
Yoshiaki Suda
Keywords:
Optoelectronics
Plume
tungsten target
Plasma
Nanomaterials
Helium
Materials science
Pulsed laser deposition
Superfluidity
Correction
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