Packaged array of eight MSM photodetectors with uniform 12 GHz bandwidth

Transmission line concepts were used in the design of a broadband, integrated photodetector array. The array consists of eight metal-semiconductor-metal (MSM) photodetectors with active regions of (26 /spl mu/m)/sup 2/, distributed along a common bus. A uniform 3 dB bandwidth of 12 GHz is demonstrated. These arrays are central to optoelectronic switching techniques, and are applicable to microwave fibre optic systems.