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Wafer-scale 3D integration of InGaAs image sensors with Si readout circuits
Wafer-scale 3D integration of InGaAs image sensors with Si readout circuits
2009
David C. Shaver
Craig L. Keast
Bruce Wheeler
Weilin Hu
Vladimir Bolkhovsky
Robert Berger
Vyshnavi Suntharalingam
A.M. Soares
J.P. Donnelly
L. J. Mahoney
Douglas C. Oakley
David Chapman
J.M. Knecht
Donna-Ruth W. Yost
Chang-Lee Chen
Keywords:
Electronic circuit
Image sensor
Wafer
Electronic engineering
Materials science
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