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Communication—Selective Adsorption of PEG on SiO2 for High Removal Selectivity in Tungsten CMP
Communication—Selective Adsorption of PEG on SiO2 for High Removal Selectivity in Tungsten CMP
2018
Kijung Kim
Kangchun Lee
Sounghyun So
Sungwook Cho
Myeongjae Lee
Keungtae You
Jinok Moon
Taeseup Song
Keywords:
PEG ratio
Tungsten
Selective adsorption
Chemistry
Inorganic chemistry
Selectivity
Correction
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