On-axis, non-contact measurement of glass thicknesses and airgaps in optical systems with submicron accuracy

This technical summary presents the fiber-optics interferometric sensor LISE and its applications in the optics industry. The summary explains the measurement principle (Section 1), describes the hardware system components (Section 2) and gives results of an experimental accuracy validation (Section 3). Section 4 illustrates the application of the sensor as a metrology tool for optics manufacturing.