Characterization of amorphous carbon films by 13C CP MAS NMR spectroscopy

13C CP MAS NMR spectroscopy was used to characterize α-C:H materials generated from methane and hydrogen mixtures using a microwave plasma. Dipolar dephasing experiments indicate a range of Tdd making quantification of quaternary “diamond”-like carbons difficult. Unconstrained lineshape analysis is not suitable for the deconvolution of the NMR spectra, but linewidth constrained analyses gave reasonable results. © 1993 John Wiley & Sons, Inc.