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Relation between crystal structures of FeSi 2 film and Fe 2 Si thickness with IBSD method
Relation between crystal structures of FeSi 2 film and Fe 2 Si thickness with IBSD method
2003
Akira Heya
M. Haraguchi
Hiroyuki Yamamoto
Takeru Saito
Kenji Yamaguchi
Kiichi Hojou
Keywords:
Scanning electron microscope
X-ray photoelectron spectroscopy
X-ray crystallography
Electron spectroscopy
Thin film
Composite material
Sputtering
Diffraction
Crystal structure
Materials science
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