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X-ray scattering from silicon surfaces
X-ray scattering from silicon surfaces
1998
Ralph Stömmer
H. Göbel
A.R Martin
W. Hub
U. Pietsch
Keywords:
Microstructure
Grazing-incidence small-angle scattering
Wafer
Scattering
X-ray
Integrated circuit
Optics
Materials science
Silicon
Correction
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