Long-wavelength SiGe/Si MQW resonant-cavity-enhanced photodetectors (RCE-PD) for application in optical fiber communication network

The paper presents long-wavelength SiGe/Si MQW resonant-cavity-enhanced photodetectors for application in optical fibre communication network. Two types of SiGe/Si MQW RCE photodetector with a narrow-band response at 1.3 /spl mu/m have been successfully obtained for the first time. One type is a RCE-PIN photodetector grown on SIMOX substrate and the other type is a RCE-MSM photodetector fabricated using wafer bonding technology. The characteristics of each detector is investigated.