Scalability of Extremely Thin SOI (ETSOI) MOSFETs to Sub-20-nm Gate Length

We report high-performance extremely thin SOI MOSFETs fabricated with a channel thickness down to 3.5 nm, sub-20-nm gate length, and contacted gate pitch of 100 nm. At an effective channel length of 18 nm, a drain-induced barrier lowering of 100 mV is achieved by either thinning the channel to 3.5 nm or by applying a reverse back-gate bias to 6-nm channel MOSFETs. Moreover, minimal increase in series resistance is seen when the channel is scaled to 3.5 nm, resulting in no performance degradation with SOI thickness scaling.