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Plasma chemistry modeling of an argon fluoride laser
Plasma chemistry modeling of an argon fluoride laser
2019
Tzvetelina Petrova
M. F. Wolford
George Petrov
Matthew C. Myers
John L. Giuliani
M.W. McGeoch
Andrew L. Schmitt
S. P. Obenschain
Keywords:
Analytical chemistry
plasma chemistry
Materials science
Argon fluoride laser
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