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High-current x-pinch x-ray/EUV radiation sources.
High-current x-pinch x-ray/EUV radiation sources.
2000
V.L. Kantsyrev
Alla S. Shlyaptseva
Bruno S. Bauer
N. Le Galloudec
Volodymyr Makhin
G. S. Sarkisov
Dmitry A. Fedin
Stephanie B. Hansen
Radu Presura
S. Batie
W. Brinsmead
H. Faretto
B. Le Galloudec
A. Oxner
D. Chamberlain
N.D. Ouart
A Jones
H. Lebeau
S.T. Rogowski
Keywords:
Radiation
Extreme ultraviolet lithography
Materials science
X-ray
Pinch
Optics
high current
Correction
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