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Comparison of Scatterometry, Imaging Scatterometry, AFM and Confocal Microscopy
Comparison of Scatterometry, Imaging Scatterometry, AFM and Confocal Microscopy
2016
Morten Madsen
Jonas Skovlund Madsen
Poul Erik Hansen
Pierre Boher
Jesper Nygård
D Dwarakanath
J.F. Jorgensen
Keywords:
Confocal microscopy
Analytical chemistry
Atomic force microscopy
Materials science
Biomedical engineering
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