Discharge Produced Plasma Extreme Ultra-Violet Source with Hollow Cathode

A pinch plasma has been formed by using a hollow inner electrode with negative polarity. Extreme ultra-violet (EUV) emission was detected from this pinch plasma. The diagnostic results were compared with that obtained with a part of outer electrode was covered with insulator. It is found that the discharge initiated between the hollow cathode and the grounded outer electrode without a creeping discharge. The hollow cathode pinch discharge was operated with energy of ~8.5 J/pulse, indicating potential application for compact EUV source.