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Nanoscale Post-Breakdown Conduction of $hboxHfO_2/hboxSiO_2$ MOS Gate Stacks Studied by Enhanced-CAFM
Nanoscale Post-Breakdown Conduction of $hboxHfO_2/hboxSiO_2$ MOS Gate Stacks Studied by Enhanced-CAFM
2005
X. Blasco
Montserrat Nafría
Xavier Aymerich
J. Petry
Wilfried Vandervorst
Keywords:
Analytical chemistry
gate stack
Nanoscopic scale
Physics
Thermal conduction
Optoelectronics
Correction
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