Arrangement for Debrisunterdrückung in a plasma-based radiation source for generating short-wave radiation

Arrangement for Debrisunterdruckung in a plasma-based radiation source for generating short-wave radiation, in particular EUV radiation, in which in a vacuum chamber (2) the source of radiation between a radiation-generating plasma (1) and a collector lens system (5) for focusing a divergent from the plasma (1) emerging radiation cone mechanical filter structures (42, 43) are arranged for the adhesive receiving debris and a buffer gas section (23) form spatially sequentially arranged by two in the radiation cone mechanical filter structures (42, 43) is limited and a defined buffer gas layer to Stosabbremsung of debris a has quasi-static pressure level, wherein the through filter structures (42, 43) in the vacuum chamber (2) existing vacuum pumping system is provided emerging buffer gas a to the vacuum chamber (2) and a gas supply for the constant buffer gas replacement between the filter structures (42, 43 ) is present, and the vacuum chamber (2) through the buffer gas section (23) is divided into a plasma section (21) and a collector section (22), wherein the plasma section (21) and the collector section (22) are separately evacuated, characterized ...