Determination of trace elements on polysilicates by ID-ICP-MS with ultrasonic nebulization/membrane desolvation
1996
This work investigates the performance of an ID-ICP-MS (isotope dilution-inductively coupled plasma mass spectrometry) system with USN/MD (ultrasonic nebulization/membrane desolvation) sample introduction for the determination of trace metal impurities in polysilicon.
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