Design of a polarization insensitive mode-size converter worked at 800 nm wavelength with simple CMOS process

2021 
A high efficient cantilever-type mode size converter applied at 800 nm wavelength is proposed and analyzed in this letter. The converter can compress and couple the light spot from a single mode fiber into the Silicon nitride waveguide effectively and smoothly. The core of the entire structure is supported by the SiO2 cantilever beam to make the device suspended, which can effectively prevent the light leaking from the substrate to cause great coupling loss. A Gaussian light source with a diameter of 4.5 μm and wavelength of 800nm is used for the coupling test. The coupling loss of the device with both TE and TM mode are greater than 0.54 dB. The alignment tolerances for 1-dB excess loss are both ± 0.8 μm in horizontal and vertical directions.
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