Minienvironment Technology And Automation Systems For Next Generation IC Fabs
1994
The integration of Minienvironment and SMIF Systems into IC fabrication provides new automation requirements and design possibilities. A scenario for an optimized, integrated Minienvironment and SMIF-based Automated facility is described and the benefits are analyzed. Recent data is presented comparing particulate contamination within various conventional open and minienvironment-based facilities worldwide.
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