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Invited) Materials and Process Technologies for Scaling BEOL Interconnects
Invited) Materials and Process Technologies for Scaling BEOL Interconnects
2021
Rinus Lee
Kai-Hung Yu
Gyana Pattanaik
Ronald Bourque
Cory Wajda
Gert J. Leusink
Keywords:
Engineering physics
Scaling
Process (computing)
Computer science
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