Amplification of DUV solid-state laser pulse using ArF laser

Deep ultra violet (DUV) lasers are actively used for material micro processing and semiconductor lithography. Argon fluoride excimer laser (ArF excimer laser) is the typical light source which can generate above 100-W optical power at the wavelength of below 200-nm. Using all-solid-state DUV light source as a seed laser and amplifying by ArF excimer, both high average power and high beam quality can be realized in the DUV region [1]. In this paper, we report on the output characteristics of hybrid ArF excimer laser.