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Quantitative analysis of crystal distortion in SiC wafer using scanning X-ray topography
Quantitative analysis of crystal distortion in SiC wafer using scanning X-ray topography
2016
Akio Yoneyama
Natsuki Yokoyama
Renichi Yamada
Keywords:
Distortion
Quantitative analysis (chemistry)
X-ray
Analytical chemistry
Wafer
Materials science
Optics
Correction
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