Characterisation of a counting imaging detector for electron detection in the energy range 10–20 keV

Abstract As part of a feasibility study into the use of novel electron detector for X-ray photoelectron emission microscopes (XPEEM) and related methods, we have characterised the imaging performance of a counting Medipix 2 readout chip bump bonded to a Silicon diode array sensor and directly exposed to electrons in the energy range 10–20 keV. Detective Quantum Efficiency (DQE), Modulation Transfer Function (MTF) and Noise Power Spectra (NPS) are presented, demonstrating very good performance for the case of electrons with an energy of 20 keV. Significant reductions in DQE are observed for electrons with energy of 15 keV and less, down to levels of 20% for electrons of 10 keV.