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Effect of Environment on Activation and Sorption of Getter Alloys and Multilayers for Hybrid Wafer-level Vacuum Packaging
Effect of Environment on Activation and Sorption of Getter Alloys and Multilayers for Hybrid Wafer-level Vacuum Packaging
2019
Alain Bosseboeuf
Sylvain Lemettre
Ming Wu
Johan Moulin
Philippe Coste
Clement Bessouet
Sana Hammami
C. Renard
L Vincent
Keywords:
Wafer
Vacuum packing
Getter
Materials science
Analytical chemistry
Sorption
Metallurgy
Correction
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