Ag cluster beam deposition for TCO/Ag/TCO multilayer

Abstract Environment friendly, thin and flexible devices require the synthesis of Indium-free new transparent conducting materials (TCM) with improved structural, thermal, electrical and optical properties. To overcome the critical issues raised by thinning the TCM, we propose a multilayer structure in which nanogranular Ag film obtained by supersonic cluster beam deposition is sandwiched in between Alluminum doped Zinc Oxide (AZO) thin layers. The introduction of the nanogranular Ag film, when compared to the standard sputtered one, yields higher optical transmittance in the technologically relevant VIS-NIR region and superior mechanical reliability while preserving low electrical resistance. The present results open new perspectives to exploit the nanogranular nature of conductive films, synthesized via Supersonic Cluster Beam Deposition, to engineer transparent conducting materials.