An Integrated Piezoelectric Inertial Actuator Controlled by Cam Mechanisms

This paper presents a battery supplied piezoelectric actuator controlled by cam mechanisms. The actuator moves by matching the phase difference between clamp and excitation cams. Piezoelectric bimorphs of the actuator are excited by signals from a contact switch driven by the excitation cam. Crucial parameters of the cam mechanisms, contour curve, stroke, and phase difference of clamp and excitation cams, were designed and verified by tests. A series of performance tests (such as frequency, voltage, etc.) were carried out, demonstrating a minimum step displacement of 0.7 μm and a minimum repeatability parameter of 0.18 μm. And performance of actuator with battery supply is basically consistent with DC power. The proposed actuator can be powered by the battery and work stably, which provides a new idea for the integration of piezoelectric actuators.