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A piezoelectric actuator and a method for manufacturing thereof, a liquid ejecting head and a recording apparatus
A piezoelectric actuator and a method for manufacturing thereof, a liquid ejecting head and a recording apparatus
2011
yasuhiro watanabe
matida osamu
osamu matida
hikari sita fuku
akira tasiro
Keywords:
Actuator
Piezoelectricity
Electronic engineering
Materials science
piezoelectric actuators
Acoustics
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