A MEMS Electro-Mechanical Device for Scanning and Energy-Harvesting Based on Moving Magnets Matrix

The article presents the improved design, modeling and simulation of a new type of MEMS electromagnetic scanning system, based on a moving matrix of permanent magnets. The previous design solution, using a mobile part as mirror and actuator, has some limitations explained through modal analysis. The second design, whose functioning is explained also through modal analysis, allow better performances and reduce disadvantages observed in the first case.